The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 30, 2018

Filed:

Mar. 28, 2016
Applicant:

Fei Company, Hillsboro, OR (US);

Inventor:

Alexander Buxbaum, Portland, OR (US);

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); H01J 37/26 (2006.01); G01N 1/28 (2006.01); H01J 37/304 (2006.01); H01J 37/305 (2006.01); G01N 1/32 (2006.01); G01N 1/44 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G01N 1/286 (2013.01); G01N 1/32 (2013.01); G01N 1/44 (2013.01); H01J 37/261 (2013.01); H01J 37/304 (2013.01); H01J 37/3056 (2013.01); H01J 2237/08 (2013.01); H01J 2237/20 (2013.01); H01J 2237/221 (2013.01); H01J 2237/226 (2013.01); H01J 2237/262 (2013.01); H01J 2237/30466 (2013.01); H01J 2237/31745 (2013.01);
Abstract

A method for using differential imaging for applications involving TEM samples by allowing operators to take multiple images during a procedure involving a focused ion beam procedure and overlaying the multiple images to create a differential image that clearly shows the differences between milling steps. The methods also involve generating real-time images of the area being milled and using the overlays of the differential images to show small changes in each image, and thus highlight the ion beam milling location. The methods also involve automating the process of creating differential images and using them to automatically mill subsequent slices.


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