The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2018
Filed:
Apr. 11, 2013
Hitachi High-technologies Corporation, Tokyo, JP;
Yutaka Tandai, Tokyo, JP;
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Abstract
The present invention provides semiconductor defect classification equipment for classifying a defect in a semiconductor wafer. The semiconductor defect classification equipment is provided with: a display unit; a storage unit that stores an inspection image including an inspection object portion on the semiconductor wafer and design data of the semiconductor wafer including a plurality of manufacturing steps; and an processing unit that displays the inspection image and the design data on the display unit. The processing unit acquires at least one first layout data and the inspection image from the storage unit, and displays the first layout data and the inspection image on the display unit in a superposed manner.