The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2018
Filed:
Sep. 28, 2016
Applicant:
Gigaphoton Inc., Tochigi-ken, JP;
Inventors:
Tsukasa Hori, Hiratsuka, JP;
Kouji Kakizaki, Hiratsuka, JP;
Tatsuya Yanagida, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Hakaru Mizoguchi, Oyama, JP;
Assignee:
Gigaphoton Inc., Tochigi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 2/00 (2006.01); H01S 3/104 (2006.01); H01S 3/16 (2006.01); H01S 3/223 (2006.01); H01S 3/23 (2006.01); H01S 3/11 (2006.01); H01S 3/09 (2006.01); H01S 3/102 (2006.01); H01S 3/00 (2006.01);
U.S. Cl.
CPC ...
H05G 2/008 (2013.01); H01S 3/0071 (2013.01); H01S 3/09 (2013.01); H01S 3/104 (2013.01); H01S 3/1106 (2013.01); H01S 3/1611 (2013.01); H01S 3/1643 (2013.01); H01S 3/1673 (2013.01); H01S 3/2232 (2013.01); H01S 3/2308 (2013.01); H01S 3/2366 (2013.01); H01S 3/2391 (2013.01); H05G 2/003 (2013.01); H05G 2/005 (2013.01); H01S 3/005 (2013.01); H01S 3/102 (2013.01);
Abstract
A system includes a chamber, a laser beam apparatus configured to generate a laser beam to be introduced into the chamber, a laser controller for the laser beam apparatus to control at least a beam intensity and an output timing of the laser beam, and a target supply unit configured to supply a target material into the chamber, the target material being irradiated with the laser beam for generating extreme ultraviolet light.