The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 23, 2018

Filed:

Jul. 13, 2016
Applicant:

Globalfoundries Singapore Pte. Ltd., Singapore, SG;

Inventors:

Xiong Zhang, Singapore, SG;

Sunny Sadana, Singapore, SG;

Yudi Setiawan, Singapore, SG;

Yoke Leng Lim, Singapore, SG;

Siow Lee Chwa, Singapore, SG;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 27/11521 (2017.01); H01L 21/762 (2006.01); H01L 29/06 (2006.01); H01L 21/28 (2006.01); H01L 21/311 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/788 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11521 (2013.01); H01L 21/0217 (2013.01); H01L 21/02164 (2013.01); H01L 21/28273 (2013.01); H01L 21/31111 (2013.01); H01L 21/76224 (2013.01); H01L 29/0649 (2013.01); H01L 29/42328 (2013.01); H01L 29/66825 (2013.01); H01L 29/788 (2013.01);
Abstract

Methods of producing integrated circuits and integrated circuits produced by those methods are provided. In an exemplary embodiment, a method of producing an integrated circuit includes forming first and second shallow trench isolations within a substrate, where the first and second shallow trench isolations have an initial shallow trench height. A base well is formed in the substrate, where the base well is positioned between the first and second shallow trench isolations. A gate dielectric is formed overlying the base well, and a floating gate is formed overlying the gate dielectric. An initial shallow trench height is reduced to a reduced shallow trench height shorter than the initial shallow trench height after the floating gate is formed.


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