The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 23, 2018

Filed:

Mar. 24, 2016
Applicant:

Jsr Corporation, Tokyo, JP;

Inventor:

Hayato Namai, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/32 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); C08F 220/30 (2006.01); C08F 220/20 (2006.01); C08F 220/26 (2006.01); C08F 220/18 (2006.01); H01L 21/027 (2006.01); G03F 7/11 (2006.01);
U.S. Cl.
CPC ...
G03F 7/325 (2013.01); C08F 220/18 (2013.01); C08F 220/20 (2013.01); C08F 220/26 (2013.01); C08F 220/30 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); G03F 7/0397 (2013.01); G03F 7/11 (2013.01); G03F 7/2004 (2013.01); G03F 7/2037 (2013.01); G03F 7/2041 (2013.01); G03F 7/2059 (2013.01); G03F 7/322 (2013.01); G03F 7/327 (2013.01); H01L 21/0271 (2013.01);
Abstract

A radiation-sensitive resin composition comprises: a polymer, and a radiation-sensitive acid generator. The polymer comprises a structural unit comprising: an acid-labile group; and an oxoacid group or phenolic hydroxyl group protected by the acid-labile group. The acid-labile group is represented by formula (1). Rand Reach independently represent a divalent organic group having 1 to 20 carbon atoms. Rrepresents a monovalent group having 1 to 40 atoms and having at least one selected from the group consisting of an oxygen atom, a sulfur atom and a nitrogen atom. * denotes a binding site to the oxy group in the oxoacid group or phenolic hydroxyl group protected.


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