The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2018
Filed:
Sep. 25, 2015
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Israel Petronius, Haifa, IL;
Barak Freedman, Yokneam, IL;
Sagy Bareket, Haifa, IL;
Arnon Hirshberg, D.N Misgav, IL;
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 7/182 (2006.01); H05K 1/02 (2006.01); B81B 7/02 (2006.01); H05K 1/11 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); B81B 7/02 (2013.01); G02B 7/1821 (2013.01); H05K 1/028 (2013.01); H05K 1/111 (2013.01);
Abstract
An apparatus for micro-electro-mechanical (MEMS) reinforcement is described herein. The apparatus includes a MEMS device and a stiffener. A micro scale mirror is to be embedded in a top layer of a substrate of the MEMS device. The stiffener is to be coupled to a back side of the MEMS device, wherein the stiffener is to stiffen the MEMS device via support of the MEMS device, without increasing a thickness of the MEMS device.