The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2018

Filed:

Jul. 10, 2017
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Shohei Koizumi, Atsugi, JP;

Takashi Sugizaki, Yokohama, JP;

Yusuke Kawakami, Yokohama, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/30 (2006.01); H01L 51/05 (2006.01); H01L 51/00 (2006.01); C23C 18/32 (2006.01); C23C 18/31 (2006.01); C23C 18/20 (2006.01); H01L 29/786 (2006.01); H01L 29/49 (2006.01); H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0529 (2013.01); C23C 18/2086 (2013.01); C23C 18/31 (2013.01); C23C 18/32 (2013.01); H01L 29/786 (2013.01); H01L 51/0017 (2013.01); H01L 51/052 (2013.01); H01L 51/055 (2013.01); H01L 51/0541 (2013.01); H01L 21/823437 (2013.01); H01L 21/823462 (2013.01); H01L 29/4908 (2013.01);
Abstract

A transistor manufacturing method includes: forming a first insulator layer of which formation material is a fluorine-containing resin, on a substrate having a source electrode, a drain electrode, and a semiconductor layer so as to cover the semiconductor layer; forming a second insulator layer to cover the first insulator layer; forming a base film on at least part of a surface of the second insulator layer; and after depositing a metal which is an electroless plating catalyst on a surface of the base film, forming a gate electrode on the surface of the base film by electroless plating, wherein the forming of the base film is performed by applying a liquid substance which is a formation material of the base film to the surface of the second insulator layer, and the second insulator layer has a higher lyophilic property with respect to the liquid substance than the first insulator layer.


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