The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2018
Filed:
Jul. 28, 2015
Applicant:
Micron Technology, Inc., Boise, ID (US);
Inventor:
Yi Chang, New Taipei, TW;
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 23/00 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67248 (2013.01); H01L 21/67109 (2013.01); H01L 21/6831 (2013.01);
Abstract
An electrostatic chuck includes a chuck base and cooling pipes. The chuck base has at least four cooling zones, in which the cooling zones viewed at a direction normal to the chuck base are fan-shaped. The cooling pipes are respectively disposed in the cooling zones of the chuck base. Therefore, the cooling pipes disposed in the different cooling zones can be controlled individually.
Quick Actions:
Chang, Yi. (2018). Electrostatic chuck and temperature-control method for the same (U.S. Patent No. 9870934). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9870934
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile