The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2018
Filed:
Jan. 06, 2015
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Dirk Schaffer, Jena, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); B29D 11/00 (2006.01); G02B 7/18 (2006.01); G02B 7/182 (2006.01); G02B 5/08 (2006.01); B23K 26/36 (2014.01);
U.S. Cl.
CPC ...
G03F 7/702 (2013.01); B23K 26/36 (2013.01); B29D 11/00596 (2013.01); G02B 5/0891 (2013.01); G02B 7/181 (2013.01); G02B 7/182 (2013.01); G02B 7/1822 (2013.01); Y10T 29/49815 (2015.01); Y10T 29/49817 (2015.01);
Abstract
A method for producing a mirror arrangement for a lithography apparatus is proposed, which comprises the following steps: producing a mirror body having a cavity delimited by a front wall, a rear wall and a side wall of the mirror body, the side wall being arranged between the front wall and the rear wall, wherein at least one supporting element is provided in the cavity between the front wall and the rear wall; and after producing the mirror body, at least partly removing the supporting element.