The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2018

Filed:

Mar. 05, 2015
Applicant:

Qualcomm Incorporated, San Diego, CA (US);

Inventors:

Sung Kyu Lim, Duluth, GA (US);

Ratibor Radojcic, San Diego, CA (US);

Yang Du, Carlsbad, CA (US);

Assignee:

QUALCOMM Incorporated, San Diego, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01); G01R 31/28 (2006.01); G01R 19/165 (2006.01); H01L 23/48 (2006.01); H01L 23/58 (2006.01); H01L 23/64 (2006.01); H01L 27/06 (2006.01); H01L 21/66 (2006.01); G01R 31/3185 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2851 (2013.01); G01R 19/16533 (2013.01); G01R 31/2853 (2013.01); H01L 22/34 (2013.01); H01L 23/481 (2013.01); H01L 23/585 (2013.01); H01L 23/647 (2013.01); H01L 27/0688 (2013.01); G01R 31/318513 (2013.01); H01L 22/14 (2013.01);
Abstract

Through-silicon via (TSV) crack sensors for detecting TSV cracks in three-dimensional (3D) integrated circuits (ICs) (3DICs), and related methods and systems are disclosed. In one aspect, a TSV crack sensor circuit is provided in which doped rings for a plurality of TSVs are interconnected in parallel such that all interconnected TSV doped rings may be tested at the same time by providing a single current into the contacts of the interconnected doped rings. In another aspect, a TSV crack sensor circuit is provided including one or more redundant TSVs. Each doped ring for a corresponding TSV is tested independently, and a defective TSV may be replaced with a spare TSV whose doped ring is not detected to be cracked. This circuit allows for correction of a compromised 3DIC by replacing possibly compromised TSVs with spare TSVs.


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