The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 16, 2018

Filed:

Jan. 14, 2015
Applicant:

Hitachi High-technologies Corporation, Tokyo, JP;

Inventors:

Takamichi Mori, Tokyo, JP;

Hitoshi Tokieda, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 35/10 (2006.01); G01N 35/02 (2006.01);
U.S. Cl.
CPC ...
G01N 35/1004 (2013.01); G01N 35/025 (2013.01); G01N 35/1002 (2013.01);
Abstract

With the increase in the speed of operation of a device, it is necessary to perform washing to drying for a wide range of a probe in a short time. A probe, a washing nozzle which ejects a washing liquid, a vacuum nozzle which sucks air, a washing tank, which is connected to the washing nozzle and the vacuum nozzle, and in which washing and drying of the probe is performed by ejecting the washing liquid from the washing nozzle and then sucking air by the vacuum nozzle, a waste liquid flow path, which is connected to the washing tank, and into which the washing liquid is discharged, and a shielding memberwhich shields a flow path between the washing tank and the waste liquid flow path after the washing liquid is ejected from the washing nozzle.


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