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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9869020 B1

PDFFull Text
Date of Patent:
Jan. 16, 2018

Filed:

Apr. 10, 2013

Protecting a target pump interior with an ald coating

Applicant:

Picosun Oy, Espoo, FI;

Inventors:

Timo Malinen, Espoo, FI;

Harri Vähämäki, Luoma, FI;

Assignee:

Picosun Oy, Espoo, FI;

Attorney:

Ziegler IP Law Group, LLC

Primary Examiner:

William P Fletcher, Iii

Int. Cl.
CPC ...
C23C 16/455 (2006.01); C30B 25/02 (2006.01); C30B 25/00 (2006.01); C30B 35/00 (2006.01); C30B 25/08 (2006.01); C30B 25/14 (2006.01); C23C 16/04 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45525 (2013.01); C23C 16/045 (2013.01); C23C 16/4412 (2013.01); C23C 16/45544 (2013.01); C23C 16/45555 (2013.01); C30B 25/00 (2013.01); C30B 25/02 (2013.01); C30B 25/025 (2013.01); C30B 25/08 (2013.01); C30B 25/14 (2013.01); C30B 35/00 (2013.01); F04C 2230/91 (2013.01); F05C 2253/12 (2013.01);
Abstract

An apparatus and method for protecting a target pump interior, where a target pump () inlet is provided with an inlet manifold () and a target pump outlet with an exhaust manifold (). The target pump interior is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases according to an ALD method via the inlet manifold into the target pump interior and outlet of reaction residue via the exhaust manifold, while the target pump is kept running or not running. A technical effect of the invention is protecting a pump interior, which can be also an assembled pump interior, by a conformal protective coating.

Find Patent Forward Citations

Malinen, Timo. (2018). Protecting a target pump interior with an ald coating (U.S. Patent No. 9869020). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9869020

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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