The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9865493 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 09, 2018

Filed:

Nov. 14, 2012
Applicant:

Jcu Corporation, Taito-ku, JP;

Inventors:

Junichiro Yoshioka, Kanagawa, JP;

Takashi Murayama, Kanagawa, JP;

Assignee:

JCU CORPORATION, Taito-ku, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); C25D 17/06 (2006.01); C25D 17/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68721 (2013.01); C25D 17/001 (2013.01); C25D 17/06 (2013.01);
Abstract

A plating jig that can form a metal plating film simultaneously on both surfaces of a semiconductor wafer by one plating process. The plating jig includes a base section and a cover section that can hold a substrate to be plated, and a center section that holds the substrate between the base section and cover section; the base section, the cover section and the center section each having an annular portion having an opening at a center thereof; seal packings each having a conductive ring disposed thereon being attached to each of facing surfaces of the annular portions of the base section and the cover section; the substrate to be plated being disposed inside the opening of the center section; and the substrate to be plated being held from front and back surfaces thereof with the seal packings attached to the cover section and the center section.


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