The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2018
Filed:
Dec. 22, 2015
Applicant:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Inventors:
Jack LoPiccolo, Gloucester, MA (US);
Paul E. Pergande, Austin, TX (US);
Assignee:
Varian Semiconductor Equipment Associats, Inc., Gloucester, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/00 (2006.01); B25J 19/00 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0014 (2013.01); B25J 19/0091 (2013.01); H01L 21/68735 (2013.01); H01L 21/68785 (2013.01); H01L 21/68792 (2013.01);
Abstract
A self-damping end effector including a base, a finger extending from the base and adapted to support a substrate, and a damper associated with the finger, the damper having a natural frequency within a predetermined tolerance of a natural frequency of the finger.