The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 02, 2018

Filed:

May. 31, 2016
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Kangguo Cheng, Schenectady, NY (US);

Joseph Ervin, Wappingers Falls, NY (US);

Juntao Li, Cohoes, NY (US);

Chengwen Pei, Danbury, CT (US);

Geng Wang, Stormville, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 29/06 (2006.01); H01L 21/3105 (2006.01); H01L 21/306 (2006.01); H01L 29/167 (2006.01); H01L 29/165 (2006.01); H01L 21/02 (2006.01); H01L 23/535 (2006.01); H01L 23/528 (2006.01); H01L 23/485 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0847 (2013.01); H01L 21/02532 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 21/02636 (2013.01); H01L 21/30604 (2013.01); H01L 21/31053 (2013.01); H01L 23/528 (2013.01); H01L 23/535 (2013.01); H01L 29/0649 (2013.01); H01L 29/165 (2013.01); H01L 29/167 (2013.01); H01L 29/66636 (2013.01); H01L 29/66659 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01); H01L 29/7835 (2013.01); H01L 23/485 (2013.01); H01L 29/7848 (2013.01); H01L 2924/0002 (2013.01);
Abstract

After forming a first-side epitaxial semiconductor region and a second-side epitaxial semiconductor region on recessed surfaces of a semiconductor portion that are not covered by a gate structure, at least one dielectric layer is formed to cover the first-side and the second-side epitaxial semiconductor regions and the gate structure. A second-side contact opening is formed within the at least one dielectric layer to expose an entirety of the second-side epitaxial semiconductor region. The exposed second-side epitaxial semiconductor region can be replaced by a new second-side epitaxial semiconductor region having a composition different from the first-side epitaxial semiconductor region or can be doped by additional dopants, thus creating an asymmetric first-side epitaxial semiconductor region and a second-side epitaxial semiconductor region. Each of the first-side epitaxial semiconductor region and the second-side epitaxial semiconducting region can function as either a source or a drain for a transistor.


Find Patent Forward Citations

Loading…