logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9857677 B1

PDFFull Text
Date of Patent:
Jan. 02, 2018

Filed:

Jan. 12, 2016

Dummy patterns

Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Chen-Hua Tsai, Hsinchu County, TW;

Jian-Cheng Chen, New Taipei, TW;

Chin-Yueh Tsai, Taichung, TW;

Yao-Jen Fan, Chiayi, TW;

Heng-Kun Chen, Tainan, TW;

Hsiang Yang, Hsinchu County, TW;

Assignee:

UNITED MICROELECTRONICS CORP., Hsin-Chu, TW;

Attorney:

Winston Hsu

Primary Examiner:

Christopher G Young

Int. Cl.
CPC ...
G03F 1/70 (2012.01); G06F 17/50 (2006.01); H01L 21/033 (2006.01); H01L 23/48 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
G03F 1/70 (2013.01); G06F 17/5072 (2013.01); H01L 21/0334 (2013.01); H01L 23/48 (2013.01); H01L 23/481 (2013.01); H01L 23/528 (2013.01); G06F 2217/12 (2013.01); H01L 2924/0002 (2013.01); Y02P 90/265 (2015.11);
Abstract

A semiconductor layout pattern includes a device layout pattern, a plurality of rectangular first dummy patterns having a first size, a plurality of rectangular second dummy patterns having second sizes, and a plurality of bar-like third dummy patterns having varied third sizes. The pattern densities are smartly equalized by positioning the second dummy patterns.

Find Patent Forward Citations

Tsai, Chen-Hua. (2018). Dummy patterns (U.S. Patent No. 9857677). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9857677

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…