The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Feb. 09, 2016
Canon Kabushiki Kaisha, Tokyo, JP;
Atsushi Maeda, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A rotary stage is controlled to two measurement positions along a rotational direction in which an object surface is moved when detecting a wavefront of reflected light from partial regions by a detector, to move the object surface. Respective placement errors in a trajectory of the object surface at the two measurement positions are measured based on wavefronts detected by the detector in states in which the rotary stage is controlled to each of the two measurement positions. For the remaining measurement positions among the measurement positions, respective placement errors with respect to the trajectory of the object surface are estimated based on the placement errors measured. Before measurement of each item of partial shape data, the rotary stage is controlled to a measurement position and stages are controlled to a position that cancels a placement error at the measurement position to align the object surface.