The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2018
Filed:
Jun. 10, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Alexander Huebel, Aalen, DE;
Thomas Niederhausen, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/42 (2006.01); G01M 11/02 (2006.01); G01M 11/00 (2006.01); G03F 7/20 (2006.01); H05G 2/00 (2006.01); G21K 1/06 (2006.01);
U.S. Cl.
CPC ...
G01M 11/0292 (2013.01); G01M 11/005 (2013.01); G03F 7/7085 (2013.01); G03F 7/70316 (2013.01); G03F 7/70591 (2013.01); H05G 2/003 (2013.01); G21K 1/062 (2013.01);
Abstract
A testing device () for an EUV optical system () includes a generating device () configured to generate wavelength variable test spectra for the EUV optical system () and a sensor unit configured to detect the test spectra generated by the EUV optical system ().