The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2017
Filed:
Aug. 18, 2016
Applicant:
Gigaphoton Inc., Tochigi, JP;
Inventors:
Takeshi Asayama, Oyama, JP;
Hiroaki Tsushima, Oyama, JP;
Kouji Kakizaki, Oyama, JP;
Osamu Wakabayashi, Oyama, JP;
Assignee:
Gigaphoton Inc., Tochigi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/038 (2006.01); H01S 3/036 (2006.01); H01S 3/225 (2006.01); H01S 3/00 (2006.01); G03F 7/20 (2006.01); H01S 3/08 (2006.01); H01S 3/097 (2006.01); H01S 3/0971 (2006.01); H01S 3/134 (2006.01); H01S 3/13 (2006.01);
U.S. Cl.
CPC ...
H01S 3/038 (2013.01); G03F 7/70025 (2013.01); H01S 3/0014 (2013.01); H01S 3/036 (2013.01); H01S 3/225 (2013.01); H01S 3/08009 (2013.01); H01S 3/0971 (2013.01); H01S 3/09705 (2013.01); H01S 3/134 (2013.01); H01S 3/1305 (2013.01);
Abstract
A gas laser apparatus includes a chamber containing a laser gas, a pair of electrodes disposed within the chamber, a fan disposed within the chamber, a motor connected to a rotating shaft of the fan, and a rotating speed control unit configured to control a rotating speed of the fan based on a wear-out parameter of the pair of electrodes.