The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2017

Filed:

Sep. 24, 2014
Applicant:

Commissariat À L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Jean-Marie Lebrun, Saint Martin D'Heres, FR;

Jean-Paul Garandet, Le Bourget du Lac, FR;

Jean-Michel Missiaen, Saint Martin D'Heres, FR;

Céline Pascal, Saint Martin D'Uriage, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 31/068 (2012.01); H01L 31/18 (2006.01); C30B 1/02 (2006.01); C30B 29/06 (2006.01); C30B 33/02 (2006.01); C30B 28/02 (2006.01); H01L 31/0368 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1872 (2013.01); C30B 1/02 (2013.01); C30B 28/02 (2013.01); C30B 29/06 (2013.01); C30B 33/02 (2013.01); H01L 31/03682 (2013.01); H01L 31/068 (2013.01); H01L 31/182 (2013.01); H01L 21/02532 (2013.01); H01L 21/02595 (2013.01); H01L 21/02667 (2013.01); Y02E 10/50 (2013.01); Y02P 70/521 (2015.11);
Abstract

A method for preparing silicon substrate having average crystallite size greater than or equal to 20 μm, including at least the steps of: (i) providing polycrystalline silicon substrate of which average grain size is less than or equal to 10 μm; (ii) subjecting substrate to overall homogeneous plastic deformation, at temperature of at least 1000° C.; (iii) subjecting substrate to localized plastic deformation in plurality of areas of substrate, called external stress areas, spacing between two consecutive areas being at least 20 μm, local deformation of substrate being strictly greater than overall deformation carried out in step (ii); step (iii) being able to be carried out subsequent to or simultaneous to step (ii); and (iv) subjecting substrate obtained in step (iii) to recrystallization heat treatment in solid phase, at temperature strictly greater than temperature used in step (ii), in order to obtain desired substrate.


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