The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2017

Filed:

Apr. 18, 2017
Applicant:

Richtek Technology Corporation, Chupei, HsinChu, TW;

Inventors:

Tsung-Yi Huang, HsinChu, TW;

Chu-Feng Chen, HsinChu, TW;

Assignee:

RICHTEK TECHNOLOGY CORPORATION, Chupei, Hsinchu, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0611 (2013.01); H01L 29/0649 (2013.01); H01L 29/1095 (2013.01); H01L 29/66712 (2013.01); H01L 29/7802 (2013.01);
Abstract

The present invention provides a DMOS device and a manufacturing method thereof. The DMOS device includes: a substrate, an epitaxial layer, a high voltage well, a body region, a gate, a source, a drain, a drift buried region and a buried region. A first PN junction is formed between the high voltage well and an upper surface of the substrate. From a cross-section view, along the channel direction, a second PN junction is formed between the drift buried region and the buried region or formed between the high voltage well and the buried region. Along the channel direction, the first PN junction and the second PN junction have respective depths. The depth is defined as a distance extending from the upper face of the epitaxial layer downward along a vertical direction. The depth of the second PN junction is shallower than the depth of the first PN junction.


Find Patent Forward Citations

Huang, Tsung-Yi. (2017). Double diffused metal oxide semiconductor device and manufacturing method thereof (U.S. Patent No. 9853099). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9853099

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