The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2017

Filed:

Mar. 30, 2016
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Yun Y. Wang, Poughquaq, NY (US);

Oh-Jung Kwon, Hopewell Junction, NY (US);

Stephen G. Fugardi, New Milford, CT (US);

Sean M. Dillon, Fishkill, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 49/02 (2006.01); H01L 27/108 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1207 (2013.01); H01L 21/28512 (2013.01); H01L 27/10829 (2013.01); H01L 27/10861 (2013.01); H01L 28/60 (2013.01);
Abstract

The migration of dislocations into pristine single crystal material during crystal growth of an adjacent conductive strap is inhibited by a conductive barrier formed at the interface between the layers. The conductive barrier may be formed by implanting carbon impurities or depositing Si:C layer that inhibits dislocation movement across the barrier layer, or by forming a passivation layer by annealing in vacuum prior to deposition of amorphous Si to prevent polycrystalline nucleation at the surface of single crystalline Si, or by implanting nucleation promoting species to enhance the nucleation of polycrystalline Si away from single crystalline Si.


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