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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9852934 B1

PDFFull Text
Date of Patent:
Dec. 26, 2017

Filed:

Feb. 14, 2014

Semiconductor wafer transportation

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Wen-Yao Hsieh, Sanchong, TW;

Wen-Kai Hsieh, Hsinchu, TW;

Si-Heng Liu, Jhubei, TW;

Lin Hung Kai, Hsinchu, TW;

Shao-Hao Chiu, Jubei, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsin-Chu, TW;

Attorney:

Haynes and Boone, LLP

Primary Examiner:

Glenn Myers

Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67379 (2013.01); H01L 21/6773 (2013.01); H01L 21/67733 (2013.01);
Abstract

A wafer transportation pod includes a body, a main compartment enclosed by the body, the main compartment to provide a controlled environment, a holding device within the main compartment, the holding device to hold a plurality of semiconductor wafers, a top latching mechanism configured to connect to another pod or a carrier mechanism of an overhead hoist transfer (OHT) system, a bottom latching mechanism configured to connect to another pod, the bottom latching mechanism being similar to the latching mechanism on the carrier.

Find Patent Forward Citations

Hsieh, Wen-Yao. (2017). Semiconductor wafer transportation (U.S. Patent No. 9852934). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9852934

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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