The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2017
Filed:
Feb. 23, 2016
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Markus Holz, Aalen, DE;
Benjamin Sigel, Aalen, DE;
Jan Horn, Munich, DE;
Benedikt Knauf, Aalen, DE;
Fabian Haacker, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G02B 26/08 (2006.01); B81B 7/00 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0833 (2013.01); B81B 7/007 (2013.01); G03F 7/2002 (2013.01); G03F 7/70058 (2013.01); H01L 2224/05554 (2013.01); H01L 2224/48091 (2013.01);
Abstract
An optical component includes at least one micro-opto-electro-mechanical system (MOEMS) with a front side and a rear side. The optical component also includes at least one printed circuit board arranged on the rear side of the at least one MOEMS. The at least one printed circuit board has lateral contacts. The at least one printed circuit board may be equipped with electronic parts and cooling elements. The at least one MOEMS projects laterally beyond the at least one printed circuit board.