The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2017

Filed:

Mar. 30, 2015
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Fen Chen, Williston, VT (US);

Roger A. Dufresne, Fairfax, VT (US);

Charles W. Griffin, Jericho, VT (US);

Kevin W. Kolvenbach, Walden, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2884 (2013.01); G01R 31/2831 (2013.01); H01L 23/5226 (2013.01); G01R 31/2886 (2013.01);
Abstract

Various particular embodiments include a via testing structure, including: a first terminal coupled to a first set of sensing lines in a top level of the structure; a second terminal coupled to a second set of sensing lines in the top level of the structure, wherein first set of sensing lines and the second set of sensing lines are disposed in a comb arrangement; a third terminal coupled to a third set of sensing lines in a bottom level of the structure; and a plurality of vias electrically coupling the second set of sensing lines in the top level of the structure to the third set of sensing lines in the bottom level of the structure, each via having a via top and a via bottom.


Find Patent Forward Citations

Loading…