The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 26, 2017

Filed:

Sep. 25, 2015
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Robert D. Allen, San Jose, CA (US);

Jeffrey Gelorme, Burlington, CT (US);

Li-Wen Hung, Mahopac, NY (US);

Ratnam Sooriyakumaran, San Jose, CA (US);

Linda K. Sundberg, Los Gatos, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); C09J 129/10 (2006.01); H01L 21/50 (2006.01); C09J 125/08 (2006.01); C08F 212/08 (2006.01); C09J 133/06 (2006.01);
U.S. Cl.
CPC ...
C09J 129/10 (2013.01); C08F 212/08 (2013.01); C09J 125/08 (2013.01); C09J 133/06 (2013.01); H01L 21/50 (2013.01); H01L 21/6835 (2013.01); H01L 2221/6834 (2013.01); H01L 2221/68318 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68381 (2013.01); Y02P 20/582 (2015.11);
Abstract

An adhesive bonding method that includes bonding a handling wafer to a front side surface of a device wafer with an adhesive comprising N-substituted maleimide copolymers. The device wafer may then be thinned from the backside surface of the device wafer while the device wafer is adhesively engaged to the handling wafer. The adhesive can then be removed by laser debonding, wherein the device wafer is separated from the handling wafer.


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