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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9850132 B1

PDFFull Text
Date of Patent:
Dec. 26, 2017

Filed:

Mar. 26, 2014

Method for growing carbon nanotubes

Applicant:

Tokyo Electron Limited, Minato-ku, Tokyo, JP;

Inventors:

Takashi Matsumoto, Nirasaki, JP;

Kenjiro Koizumi, Nirasaki, JP;

Assignee:

TOKYO ELECTRON LIMITED, Minato-Ku, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Primary Examiner:

Charles Garber

Assistant Examiner:

Abdulfattah Mustapha

Int. Cl.
CPC ...
H01L 21/44 (2006.01); C01B 31/02 (2006.01); B01J 37/34 (2006.01); B01J 35/00 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01); C01B 32/162 (2017.01); C01B 32/164 (2017.01); B01J 23/46 (2006.01); B01J 23/52 (2006.01); B01J 23/745 (2006.01); B01J 23/75 (2006.01); B01J 23/755 (2006.01);
U.S. Cl.
CPC ...
C01B 31/024 (2013.01); B01J 35/0013 (2013.01); B01J 37/349 (2013.01); C01B 32/162 (2017.08); C01B 32/164 (2017.08); H01L 21/28556 (2013.01); H01L 21/76876 (2013.01); B01J 23/462 (2013.01); B01J 23/52 (2013.01); B01J 23/745 (2013.01); B01J 23/75 (2013.01); B01J 23/755 (2013.01); H01L 2221/1094 (2013.01);
Abstract

Provided is a method for growing carbon nanotubes that enables the growth of high-density carbon nanotubes. A high frequency bias voltage is applied to a loading table on which a wafer W having a catalytic metal layer is mounted to generate a bias potential on the surface of the wafer W, and oxygen plasma is used to micronize the catalytic metal layer to form catalytic metal particles. Thereafter, hydrogen plasma is used to reduce the surface of the catalytic metal particles to form activated catalytic metal particles having an activated surface. By using each activated catalytic metal particles as a nucleus, carbon nanotubes are formed.

Find Patent Forward Citations

Matsumoto, Takashi. (2017). Method for growing carbon nanotubes (U.S. Patent No. 9850132). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9850132

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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