The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2017
Filed:
Sep. 10, 2014
Ebara Corporation, Tokyo, JP;
Shunsuke Matsuzawa, Tokyo, JP;
Masafumi Inoue, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
It is an object of the embodiment of the invention to enhance the work efficiency of a substrate transfer test between a plurality of units. A test control section (CPU) which is provided in a loading/unloading unitperforms a substrate transfer test for the loading/unloading unitalone by receiving a wafer mounted on a substrate tableorwhich is installed outside the loading/unloading unitand transporting the wafer into the loading/unloading unitby a transport mechanism or transporting a wafer placed in the loading/unloading unitto a substrate tableand mounting the wafer on the substrate tableby the transport mechanism while the loading/unloading unitis not assembled together with the cleaning unit and the polishing unit.