The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2017
Filed:
Aug. 10, 2016
Ict Integrated Circuit Testing Gesellschaft Für Halbleiterprüftechnik Mbh, Heimstetten, DE;
Pavel Adamec, Haar, DE;
Abstract
The present disclosure provides an electron beam device () for inspecting a sample () with an electron beam, comprising an electron beam source comprising a cold field emitter () for emitting an electron beam, electron beam optics for directing and focusing the electron beam onto the sample (), and a detector device () for detecting secondary charged particles generated by impingement of the electron beam on the sample (). The cold field emitter () includes an emitter tip (), a base arrangement () configured for supporting the emitter tip () and comprising a first base element () and a second base element (), and a filament () having at least a first filament portion () and a second filament portion () attaching the emitter tip () to the base arrangement (), wherein the first filament portion () extends between the emitter tip () and the first base element () and the second filament portion () extends between the emitter tip () and the second base element (), wherein a length (L) of each of the first filament portion () and the second filament portion () is 4 mm or less, and wherein a diameter of a cross-section of each of the first filament portion () and the second filament portion () is 0.13 mm or less.