The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2017
Filed:
Aug. 31, 2006
Yasuhiro Omura, Kumagaya, JP;
Yasuhiro Omura, Kumagaya, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A catadioptric projection objective images a pattern provided in an object plane of the projection objective onto an image plane of the projection objective. The projection objective includes first, second and third objective parts. The first objective part images the pattern into a first intermediate image. The second objective part images the first intermediate image into a second intermediate image. The third objective part images the second intermediate image onto the image plane. A first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image. Pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate images and between the second intermediate image and the image plane. All concave mirrors are arranged optically remote from a pupil surface.