The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2017
Filed:
Sep. 06, 2013
National University of Singapore, Singapore, SG;
NATIONAL UNIVERSITY OF SINGAPORE, Singapore, SG;
Abstract
Systems and methods for spinwave-based metrology in accordance with embodiments of the disclosure involve generating and detecting spinwaves in a sample having a ferromagnetic material; and determining a material thickness, a material integrity measure, a presence of a manufacturing defect, a categorical type of manufacturing defect, and/or a manufacturing process statistic corresponding to spinwave behavior in the sample. In an embodiment, spinwaves are generated by way of concurrent exposure of a target measurement site of the sample to each of a bias magnetic field and radiation (e.g., microwave or radio frequency radiation) produced by a first set of integrated waveguides. A response signal corresponding to a behavior of spinwaves within the target measurement site can be generated by way of a second set of integrated waveguides. Various embodiments of systems and methods for generating spinwaves, detecting spinwaves, and calculating, analyzing, or monitoring one or more sample properties can be automated.