The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2017
Filed:
Oct. 24, 2014
Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;
Kenichi Ohtsuka, Hamamatsu, JP;
Tetsuhisa Nakano, Hamamatsu, JP;
HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
A film thickness measurement deviceA includes a light emission unitfor emitting light onto a measurement object, a light detection unitA for detecting the wavelength-dependent intensity of reflected light, and a film thickness calculation unitA for determining the film thickness of a first filmby comparing measured spectral reflectance obtained based on the detection result in the light detection unitA with theoretical spectral reflectance that takes into account front surface reflectance, front surface transmissivity, and back surface reflectance. The film thickness calculation unitA compares the measured spectral reflectance with a plurality of values of the theoretical spectral reflectance obtained by changing the front surface reflectance value, the front surface transmissivity value, and the back surface reflectance value, and determines the film thickness of the first filmbased on the theoretical spectral reflectance closest to the measured spectral reflectance.