The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2017
Filed:
Aug. 03, 2015
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Michael Schall, Essingen, DE;
Johannes Kraus, Theilheim, DE;
Holger Muenz, Aalen, DE;
Ingrid Schuster, Oberkochen, DE;
Willi Anderl, Huettlingen, DE;
Ulrich Weber, Ulm, DE;
Markus Bauer, Oberkochen, DE;
Jeffrey Erxmeyer, Oberkochen, DE;
Michel Le Maire, Oberkochen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/07 (2006.01); H01S 3/081 (2006.01); G02B 7/18 (2006.01); H01S 3/00 (2006.01); H01S 3/225 (2006.01); G02B 5/08 (2006.01); H01S 3/10 (2006.01); G02B 5/04 (2006.01); G02B 5/12 (2006.01); H01S 3/23 (2006.01);
U.S. Cl.
CPC ...
H01S 3/0071 (2013.01); G02B 5/04 (2013.01); G02B 5/08 (2013.01); G02B 5/12 (2013.01); G02B 7/1815 (2013.01); H01S 3/10023 (2013.01); H01S 3/2251 (2013.01); H01S 3/2256 (2013.01); H01S 3/2333 (2013.01); H01S 3/005 (2013.01); H01S 3/225 (2013.01);
Abstract
A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.