The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2017
Filed:
Mar. 05, 2014
Asml Netherlands B.v., Veldhoven, NL;
Niek Antonius Jacobus Maria Kleemans, Eindhoven, NL;
Denis Alexandrovich Glushkov, Alfter, DE;
Ronald Johannes Hultermans, Waalre, NL;
Benedictus Mathijs Renkens, Sittard, NL;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
Christiaan Johannes Petrus Verspeek, Veldhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A source collector apparatus for use in a lithographic apparatus includes a fuel droplet generator configured in use to generate a stream of fuel droplets directed from an outlet of the fuel droplet generator towards a plasma formation location. In order to prevent droplet satellites from interfering with plasma formation, a gas supply is provided that in use provides a flow of gas (e.g., hydrogen) that deflects any droplet satellites out of the fuel droplet stream. Additionally, a detection apparatus may be provided as part of a shroud to determine the point at which coalescence of fuel droplets occurs thereby providing an indication of the likelihood of satellite droplets being present in the fuel droplet stream.