The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 12, 2017

Filed:

Jan. 23, 2015
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventor:

Hsiu-Ying Cho, Hsin Chu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01); G01R 31/28 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01R 31/282 (2013.01); G01R 31/26 (2013.01); H01L 22/34 (2013.01); H01L 2924/0002 (2013.01); Y10T 29/49004 (2015.01);
Abstract

De-embedding apparatus and methods of de-embedding are disclosed. A de-embedding apparatus includes a test structure including a device-under-test (DUT) embedded in the test structure, and a plurality of dummy test structures including an open dummy structure, a distributed open dummy structure, and a short dummy structure. The distributed open dummy structure may include a first signal transmission line coupled to a left signal test pad and a second signal transmission line coupled to a right signal test pad, the first and second signal transmission lines having a smaller total length than a total length of signal transmission lines of the open dummy structure, and intrinsic transmission characteristics of the DUT can be derived from transmission parameters of the dummy test structures and the test structure.


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