The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2017
Filed:
Jul. 26, 2016
Applicant:
Agency for Science, Technology and Research, Singapore, SG;
Inventors:
Daniel Rhee Min Woo, Singapore, SG;
How Yuan Hwang, Singapore, SG;
Vivek Chidambaram, Singapore, SG;
Yuen Sing Chan, Singapore, SG;
Eva Leong Ching Wai, Singapore, SG;
Jong Bum Lee, Singapore, SG;
Assignee:
Agency for Science, Technology and Research, Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/31 (2006.01); G01N 27/414 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 21/56 (2006.01); H01L 21/768 (2006.01); H01L 23/48 (2006.01);
U.S. Cl.
CPC ...
G01N 27/414 (2013.01); H01L 21/56 (2013.01); H01L 21/565 (2013.01); H01L 21/76895 (2013.01); H01L 23/315 (2013.01); H01L 23/3114 (2013.01); H01L 23/3135 (2013.01); H01L 23/481 (2013.01); H01L 29/66477 (2013.01); H01L 29/78 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A package for a chemical sensor including an encapsulation and a pressure balancing structure is disclosed. The encapsulation encapsulates a chemical sensor and has a hole for exposing a chemical sensitive part of the chemical sensor. The pressure balancing structure balances pressure applied to the chemical sensor at the chemical sensitive part.