The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 05, 2017

Filed:

Sep. 09, 2013
Applicant:

Kyocera Corporation, Kyoto-shi, Kyoto, JP;

Inventors:

Hideki Matsushita, Kyoto, JP;

Masanobu Kitada, Kyoto, JP;

Assignee:

KYOCERA CORPORATION, Kyoto-Shi, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 38/00 (2006.01); H01L 23/00 (2006.01); C23C 14/18 (2006.01); C23C 14/46 (2006.01); B32B 37/18 (2006.01); B32B 37/24 (2006.01); H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
H01L 24/83 (2013.01); B32B 37/18 (2013.01); B32B 37/24 (2013.01); B32B 38/0008 (2013.01); B32B 38/0036 (2013.01); C23C 14/18 (2013.01); C23C 14/46 (2013.01); H01L 21/2007 (2013.01); B32B 2037/243 (2013.01); B32B 2305/30 (2013.01); B32B 2310/14 (2013.01); B32B 2311/00 (2013.01); B32B 2313/00 (2013.01); B32B 2457/14 (2013.01); H01L 2924/365 (2013.01);
Abstract

Provided is a device in which the metal content existing in a joining interface is controlled. A manufacturing method for the device comprises: a step in which the surfaces of a first substrate and a second substrate are activated using a FAB gun; a step in which a plurality of metals are discharged by using the FAB gun to sputter a discharged metal body comprising the plurality of metals, and the plurality of metals are affixed to the surfaces of the first substrate and the second substrate; a step in which the first substrate and the second substrate are joined at room temperature; and a step in which heating is performed at a temperature that is high in comparison to the agglomeration start temperature of the plurality of metals and of the elements that constitute the first substrate or the second substrate. With regards to the step in which the plurality of metals are affixed, the density of the plurality of metals existing on the joining interface of the first substrate and the second substrate is set to 1×10/cmor less by adjusting the exposure area of the discharged metal body.


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