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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9835947 B1

PDFFull Text
Date of Patent:
Dec. 05, 2017

Filed:

Sep. 06, 2016

Self-organization material and pattern formation method

Applicant:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Inventors:

Yuriko Seino, Tokyo, JP;

Naoko Kihara, Kanagawa, JP;

Assignee:

Kabushiki Kaisha Toshiba, Tokyo, JP;

Attorney:

Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.

Primary Examiner:

Amanda C Walke

Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/11 (2006.01); G03F 7/16 (2006.01); C09D 153/00 (2006.01); C09D 183/10 (2006.01); C09D 133/12 (2006.01); G03F 7/00 (2006.01); G03F 7/40 (2006.01); H01L 21/311 (2006.01); H01L 21/306 (2006.01); H01L 21/02 (2006.01); H01L 21/027 (2006.01); B81C 1/00 (2006.01); B82Y 40/00 (2011.01); B82Y 30/00 (2011.01); C08G 77/44 (2006.01);
U.S. Cl.
CPC ...
G03F 7/165 (2013.01); B81C 1/00031 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C09D 133/12 (2013.01); C09D 153/00 (2013.01); C09D 183/10 (2013.01); G03F 7/002 (2013.01); G03F 7/0035 (2013.01); G03F 7/11 (2013.01); G03F 7/40 (2013.01); H01L 21/0275 (2013.01); H01L 21/02118 (2013.01); H01L 21/30604 (2013.01); H01L 21/31138 (2013.01); H01L 21/31144 (2013.01); B81C 2201/0149 (2013.01); C08G 77/44 (2013.01);
Abstract

A self-organization material according to an embodiment includes a block copolymer and a top coat material. The block copolymer contains a first block and a second block. The second block has a surface free energy higher than that of the first block. The top coat material contains a first portion having a surface free energy higher than that of the first block and lower than that of the second block, and a second portion having a surface free energy lower than that of the first block. The first portion is one of a homopolymer miscible with both the first block and the second block, and a random copolymer having a repeating unit of the first block and a repeating unit of the second block. The second portion is one of an organic siloxane-containing polymer and a fluorine-containing polymer.

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