The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2017
Filed:
Oct. 27, 2014
Canon Kabushiki Kaisha, Tokyo, JP;
Hitoshi Nakano, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides an imprint apparatus for performing an imprint process of molding an imprint material on a substrate with a mold to form a pattern on the substrate, the apparatus including a supply device configured to supply, to a space between the imprint material on the substrate and the mold, a penetrating gas that penetrates at least one of the mold, the imprint material and the substrate and a condensable gas that is liquefied by pressure rise due to the molding, and a controller configured to control the supply device so as to change at least one of a supply amount of the penetrating gas and a supply amount of the condensable gas based on information on a recipe for the imprint process.