The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 05, 2017

Filed:

Sep. 22, 2014
Applicant:

Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;

Inventor:

Nobuhiro Shiramizu, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 9/02 (2006.01); G01N 21/3581 (2014.01); G01B 9/02 (2006.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
G01J 9/02 (2013.01); G01B 9/02041 (2013.01); G01B 11/0675 (2013.01); G01N 21/3581 (2013.01);
Abstract

In order to provide a high-sensitivity terahertz wave phase difference measurement system having a high S/N ratio, terahertz interference waves are observed using a half mirror and a movable reference mirror, and the phase difference is calculated, by a terahertz wave generation/detection device that obtains a high S/N ratio by employing a terahertz wave generator for irradiating a non-linear optical crystal with angular phase-matched pump light and seed light, and a terahertz wave detector for irradiating a non-linear optical crystal with angular phase-matched pump light and terahertz waves. In order to match the optical path length of the pump light and the terahertz waves irrespective of the position of the movable reference mirror and the position of a measured object, a first optical delay device, and a second optical delay device that operates in conjunction with movement of a movable reference mirror of a Michelson interferometer, are introduced on the optical path of the pump light.


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