The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2017
Filed:
Mar. 04, 2016
Helmut Fischer Gmbh Institut Fur Elektronik Und Messtechnik, Sindelfingen, DE;
Helmut Fischer, Oberageri, CH;
Helmut Fischer GmbH Institut für Elektronik und Messtechnik, Sindelfingen, DE;
Abstract
The invention relates to a method for the electric control of a measurement stand () having a drive movement of at least one measurement probe () from an initial position () into a measurement position (), in particular for the measurement of the thickness of thin layers in which a motor () is controlled for the drive movement of the measurement probe (), said motor () moving a ram (), to which the measurement probe () is fastened, back and forth via a drive device () at least for the implementation of a measurement, wherein before a first measurement with the measurement probe (), a learning routine is carried out, and for the subsequent implementation of one or more measurements, the measurement probe () is transferred from the initial position () into the measurement position (), and the drive path of the measurement probe () from the initial position () into the measurement position () is divided into a fast speed and, before the setting of the measurement probe () on the measurement object (), a slow speed, wherein the number of pulses for the fast speed is reduced by the number of pulses for the slow speed, originating from the total number of the determined pulses of the drive path and the number of pulses for the drive path at the fast speed is a multiple of the number of pulses of the drive path at the slow speed.