The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2017
Filed:
Nov. 20, 2015
Tehmoor M. Dar, Mesa, AZ (US);
Bruno J. Debeurre, Phoenix, AZ (US);
Raimondo P. Sessego, Chandler, AZ (US);
Richard A. Deken, Madison, MS (US);
Aaron A. Geisberger, Austin, TX (US);
Krithivasan Suryanarayanan, Chandler, AZ (US);
Tehmoor M. Dar, Mesa, AZ (US);
Bruno J. Debeurre, Phoenix, AZ (US);
Raimondo P. Sessego, Chandler, AZ (US);
Richard A. Deken, Madison, MS (US);
Aaron A. Geisberger, Austin, TX (US);
Krithivasan Suryanarayanan, Chandler, AZ (US);
NXP USA, INC., Austin, TX (US);
Abstract
A sensor system includes a microelectromechanical systems (MEMS) sensor, processing circuitry, measurement circuitry, stimulus circuitry and memory. The system is configured to provide an output responsive to physical displacement within the MEMS sensor to the measurement circuitry. The stimulus circuitry is configured to provide a stimulus signal to the MEMS sensor to cause a physical displacement within the MEMS sensor. The measurement circuitry is configured to process the output from the MEMS sensor and provide it to the processing circuitry, which is configured to generate stimulus signals and provide them to the stimulus circuitry for provision to the MEMS sensor. Output from the measurement circuitry corresponding to the physical displacement occurring in the MEMS sensor is monitored and used to calculate MEMS sensor characteristics. Methods for monitoring and calibrating MEMS sensors are also provided.