The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2017
Filed:
Jun. 11, 2013
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Christopher Wargo, Wellesley, MA (US);
Thomas LeBlanc, Mendon, MA (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 1/00 (2006.01); B29C 45/17 (2006.01); C08J 9/06 (2006.01); A46B 13/00 (2006.01); B29C 33/00 (2006.01); B29C 33/44 (2006.01); B29C 44/58 (2006.01); H01L 21/67 (2006.01); B29L 23/00 (2006.01); B29C 44/42 (2006.01);
U.S. Cl.
CPC ...
A46B 13/001 (2013.01); B08B 1/002 (2013.01); B29C 33/005 (2013.01); B29C 33/0033 (2013.01); B29C 33/44 (2013.01); B29C 44/583 (2013.01); B29C 45/17 (2013.01); C08J 9/06 (2013.01); H01L 21/67046 (2013.01); B29C 44/42 (2013.01); B29L 2023/00 (2013.01);
Abstract
A rotatable base for a porous pad has openings that provide for improved flow distribution of a liquid in the base across a substrate. The rotatable base can be molded from a two piece mold and the openings can have draft angles to facilitate the molding process.