The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 2017

Filed:

Dec. 19, 2014
Applicant:

Nuvosun, Inc., Milpitas, CA (US);

Inventors:

Bruce Hachtmann, San Martin, CA (US);

Preston Clover, Pasadena, CA (US);

Dennis Hollars, Madera, CA (US);

Arthur C. Wall, Morgan Hill, CA (US);

Rocky Taylor, Los Gatos, CA (US);

Gang Grant Peng, Fremont, CA (US);

Assignee:

Nuvosun, Inc., Milipitas, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/18 (2006.01); H01L 31/0392 (2006.01); B05C 5/00 (2006.01); B05C 11/02 (2006.01); B05C 11/10 (2006.01); C23C 18/12 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1876 (2013.01); B05C 5/007 (2013.01); B05C 11/026 (2013.01); B05C 11/1039 (2013.01); H01L 31/03925 (2013.01); H01L 31/03926 (2013.01); H01L 31/1836 (2013.01); H01L 31/1884 (2013.01); C23C 18/1204 (2013.01); C23C 18/125 (2013.01); Y02E 10/50 (2013.01);
Abstract

Methods and systems for forming a layer from a fluid mixture on a web are provided. The system includes a fluid delivery apparatus for delivering the fluid mixture onto the web. The fluid delivery apparatus includes a cascade device and a chemical dispenser device. The system also includes a fluid stirring apparatus comprising at least one fan positioned over the web and configured to generate a flow pattern that stirs the fluid mixture on the web while the layer is being formed, without the at least one fan contacting the fluid mixture. The system further includes a fluid removal apparatus having a rinsing device and a suction device. The rinsing device is configured to dispense a rinsing fluid onto the web. The suction device is configured to remove by suction the rinsing fluid and a remaining portion of the fluid mixture remaining on the web after formation of the layer.


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