The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2017
Filed:
Sep. 20, 2016
Applicant:
Applied Materials Israel Ltd., Rehovot, IL;
Inventors:
Assignee:
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); H01J 37/16 (2006.01); G03F 7/00 (2006.01); G02B 7/18 (2006.01); G01B 11/14 (2006.01); G01B 9/02 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
G02B 7/181 (2013.01); G01B 9/02049 (2013.01); G01B 11/14 (2013.01); H01J 37/20 (2013.01); H01J 37/28 (2013.01); H01J 2237/2007 (2013.01);
Abstract
A chuck interface that includes a mirror; an inner surface that is shaped and sized to match a portion of a sidewall of a chuck; wherein the inner surface is mechanically coupled to the mirror; and at least one interfacing element for assisting in attaching the chuck to the mirror; and wherein a difference between a thermal expansion coefficient of the chuck and a thermal expansion coefficient of the mirror does not exceed 0.5 micron*Kelvin per Meter.