The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2017
Filed:
Feb. 19, 2016
Applicant:
Globalfoundries Inc., Grand Cayman, KY;
Inventors:
Ping-Chuan Wang, Hopewell Junction, NY (US);
Andrew T. Kim, Poughkeepsie, NY (US);
Ronald G. Filippi, Wappingers Falls, NY (US);
Assignee:
GLOBALFOUNDRIES INC., Grand Cayman, KY;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/28 (2006.01); H01L 21/66 (2006.01); H01L 23/522 (2006.01); H01L 27/08 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2858 (2013.01); H01L 22/34 (2013.01); H01L 23/5226 (2013.01); H01L 27/0802 (2013.01);
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to interconnect reliability structures and methods of manufacture. The structure includes: a plurality of resistors; and a voltmeter configured to sense a relative difference in resistance of the plurality of resistors indicative of at least one of a via-depletion and line-depletion.