The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Mar. 09, 2016
Asml Netherlands B.v., Veldhoven, NL;
Peter Danny Van Voorst, Nijmegen, NL;
Duygu Akbulut, Eindhoven, NL;
Koos Van Berkel, Waalre, NL;
Jeroen Johan Maarten Van De Wijdeven, Eindhoven, NL;
Ferry Zijp, Nuenen, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method of position control of an optical component relative to a surface is disclosed. The method may include: obtaining a first signal by a first position measurement process; controlling relative movement between the optical component and the surface for a first range of motion using the first signal; obtaining a second signal by a second position measurement process different than the first position measurement process; and controlling relative movement between the optical component and the surface for a second range of motion using the second signal, the second range of motion being nearer the surface than the first range of motion.