The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2017
Filed:
Jun. 10, 2013
Freescale Semiconductor, Inc., Austin, TX (US);
Tab A. Stephens, Austin, TX (US);
Perry H. Pelley, Austin, TX (US);
Michael B. McShane, Austin, TX (US);
NXP USA, INC., Austin, TX (US);
Abstract
An integrated circuit optical backplane die and associated semiconductor fabrication process are described for forming optical backplane mirror structures for perpendicularly deflecting optical signals out of the plane of the optical backplane die by selectively etching an optical waveguide semiconductor layer () on an optical backplane die wafer using an orientation-dependent anisotropic wet etch process to form a first recess opening () with angled semiconductor sidewall surfaces () on the optical waveguide semiconductor layer, where the angled semiconductor sidewall surfaces () are processed to form an optical backplane mirror () for perpendicularly deflecting optical signals to and from a lateral plane of the optical waveguide semiconductor layer.