The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 07, 2017

Filed:

Sep. 02, 2014
Applicant:

Inficon Gmbh, Cologne, DE;

Inventors:

Heike Hilgers, Bergisch Gladbach, DE;

Hjalmar Bruhns, Bonn, DE;

Daniel Wetzig, Cologne, DE;

Norbert Rolff, Kerpen, DE;

Assignee:

Inficon GmbH, Cologne, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F04D 19/04 (2006.01); G01M 3/20 (2006.01); G01L 19/06 (2006.01);
U.S. Cl.
CPC ...
G01M 3/205 (2013.01); G01L 19/0654 (2013.01); F04D 19/046 (2013.01);
Abstract

A sniffer leak detector includes a mass spectrometer for analyzing hydrogen or helium, a turbomolecular pump which is connected with said mass spectrometer and whose outlet is connected with a prevacuum pump, and a sniffer probe which includes a plurality of intake lines and is connected with said inlet of said turbomolecular pump, wherein a vacuum pump includes at least three stages whose inlet stage defines said prevacuum pump and is connected with said outlet of said turbomolecular pump via a blocked throttle, wherein, between adjacent stages of said vacuum pump, an intermediate inlet each is provided, wherein each intermediate inlet is connected with a different intake line of said sniffer probe and at least one of the intake lines as a suction line is connected with said inlet of said turbomolecular pump for obtaining different gas flows.


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