The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2017
Filed:
Aug. 04, 2016
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Christopher Lupoli, Exeter, NH (US);
Sheri A. Durgin, Salem, MA (US);
Daniel McGillicuddy, West Peabody, MA (US);
Victor J. Theriault, South Hamilton, MA (US);
Klaus Becker, Kensington, NH (US);
Varian Semiconductor Equipment Associates Inc., Gloucester, MA (US);
Abstract
An electrode for manipulating an ion beam. The electrode may include an insert having an ion beam aperture to conduct the ion beam therethrough, the insert comprising a first electrically conductive material; a frame disposed around the insert and comprising a second electrically conductive material; and an outer portion, the outer portion disposed around the frame and comprising a third electrically conductive material, wherein the insert is reversibly detachable from the frame, and wherein the frame is reversibly attachable from the outer portion.